Project Title:
SMART Reactors Project A04: Self-regulating enhanced surfaces for autonomously operated bioprocesses
Related Publication:
Rennpferdt, Lukas, Sven Bohne, and Hoc Khiem Trieu. "Enhancing the Applicability of Femtosecond Laser Written Waveguides in Fused Silica." MikroSystemTechnik Kongress 2025; Kongress. VDE, 2025.
Principal Investigators / Authors:
Rennpferdt, Lukas, Institute of Microsystems Technology, Hamburg University of Technology, Hamburg, Germany
Sven Bohne, Institute of Microsystems Technology, Hamburg University of Technology, Hamburg, Germany
Hoc Khiem Trieu Institute of Microsystems Technology, Hamburg University of Technology, Hamburg, Germany
Funding Acknowledgement:
This data set was generated as part of the DFG-funded project CRC 1615: SMART Reactors for Future Process Engineering (DFG Project Number: 503850735).

1. General Information
Data set Title:
Optical Profilometer Dataset for Diced Surfaces Obtained with Wafer Dicing Machine at Varying Feed Velocities
Short Description:
The dataset contains raw data generated with an optical profilometer of the surface roughness of wafer-level diced fused silica with different feed velocities. The data set can be used to display and analyze the recorded surface roughness of the diced surfaces.
Date of Data Collection:
2025-08-10
Geographical Coverage (if applicable):
Eißendorfer Straße 42, 21073 Hamburg, Germany
Keywords:
Optical Profilometer, Surface Roughness, Quartz Wafer, Waveguide Endfacet

2. Methodological Information
Data Collection and Processing:
The data were measured using a Keyence VK-X3000 optical profilometer in white-light interferometer mode with an 10x objective.
Experimental Design / Study Context:
A fused silica wafer (1 mm thickness, 100 mm diameter) was diced with a wafer dicing machine (Disco DAD3350) at different feed velocities from 0.1 mm/s to 5 mm/s. The spindle speed was set to 30.000 rpm and a diamond blade (Disco, R07-SDC600-BB101-75) was used. The wafer was diced through completely. Then the samples were placed in a sample holder and the diced surface was analyzed with the optical profilometer.
3. Data and File Overview
List of Files and Structure:
File / Folder
Description
Format
Size
data_raw/
Raw data files
.vk7
24.7 MB
File Naming Convention:
File naming: “Dicing_surfaceroughness_white_light_XXmms.vk7”
“XX” displays the related feed velocity. 0_1 --> 0.1 mm/s; 1 --> 1mm/s
Number of Records / Observations:
The dataset includes six 2D maps of the surface profile, each for a different feed velocity.

4. Access and Licensing Information
Repository and Persistent Identifier:
Published via TORE, DOI: https://doi.org/10.15480/882.15763
License for Use:
Public Domain
Text for Citation:
The dataset should be cited using https://doi.org/10.15480/882.15763.

5. Reproducibility and Software Dependencies
Software Required:
Keyence VK-X 3000 MultiFileAnalyzer (VK-A3D)
Scripts, Workflow and Reproducibility Notes:
The dataset shows a 2D map from the surface roughness for each diced sidewall. The surface roughness was measured as the line roughness in multiple-line mode.
6. Ethical and Legal Aspects
Data Protection:
-
Consent Statement:
-

7. Versioning and Updates
Version Number:
Version v1.0
Date of Release:
2026-01-28
Change Log:
-

8. Contact Information
Corresponding Author:
Name: Lukas Rennpferdt
Institution: Institute of Microsystems Technology, Hamburg University of Technology, Hamburg, Germany
Email: lukas.rennpferdt@tuhh.de