IKT 2020 - Forschung für Innovationen, Verbundprojekt: 1D-basierte Sensoren für Gase und Magnetfelder - 1D-SENSE; Teilvorhaben: Untersuchung von Herstellungsverfahren zur Erzeugung von 1D-Nanoobjekten auf ALD-Basis


Project Acronym
1D-SENSE
 
Project Title
1D based sensores for gases and magnetic fileds - 1D-SENSE; Investigation of fabrication method for the realization of 1D nano structures on the basis of ALD
 
Funding Code
16ESO291
 
 
Principal Investigator
 
Co-Worker
 
Status
Abgeschlossen
 
Duration
01-10-2014
-
31-03-2017
 
 
Contractor Organization(s)
 
Project Abstract
1D nano structures are due to their high surface to volume ratio particularly sensitive sensor elements. ALD is known as a thin film deposition technique with high film quality and conformity. In this part of the project 1D-SENSE methods based on ALD for the generation of 1D nano structures on template materials as sensors for gases and magnetic fields are investigated.