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Equipment
Oxford PECVD PlasmaPro 100
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Equipment description
Name
Oxford PECVD PlasmaPro 100
Manufacturer
Oxford Instruments GmbH
DOI
10.15480/882.14296
Internal ID
36502009923-00
Classification
0920 -- PECVD-Anlagen (Plasma-Emissions-Beschichtung)
Access
Owner Organisation
Mikrosystemtechnik E-7
Contact Person
Trieu, Hoc Khiem
Available since
March 21, 2022