Name
Parylene Labcoator 300
DOI
10.15480/882.14376
Internal ID
36502007471-00
Classification
0920 -- PECVD-Anlagen (Plasma-Emissions-Beschichtung)
Owner Organisation
Mikrosystemtechnik E-7  
Contact Person
Trieu, Hoc Khiem  
Available since
March 13, 2018