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Planar integriertes Mikromassenspektrometer : Simulation, Ansteuerung und Charakterisierung
Citation Link: https://doi.org/10.15480/882.762
Other Titles
Planar integrated micro mass spectrometer : simulation, control and characterization
Publikationstyp
Doctoral Thesis
Date Issued
2009
Sprache
German
Author(s)
Advisor
Title Granting Institution
Technische Universität Hamburg
Place of Title Granting Institution
Hamburg
Examination Date
2009-12-17
Institut
TORE-DOI
The concept, development and characterization of the planar integrated micro mass spectrometer (PIMMS), fabricated in microsystems technology, is presented. Key topics are the calculation and simulation of ion trajectories, the generation of electrons by a micro plasma and the control electronics. The measurement of mass spectra with the PIMMS shows the experimental proof of concept.
Subjects
Mikroplasma
Micro mass spectrometer
Micro plasma
Capacitively coupled plasma
Ion optics
MEMS
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