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Design und Herstellung eines planar integrierten Mikromassenspektrometers mit Micro-Channel-Plate-Detektor
Citation Link: https://doi.org/10.15480/882.782
Other Titles
Design and fabrication of a planar integrated micro-mass- spectrometer with a micro-channel-plate detector
Publikationstyp
Doctoral Thesis
Date Issued
2010
Sprache
German
Author(s)
Advisor
Title Granting Institution
Technische Universität Hamburg
Place of Title Granting Institution
Hamburg
Examination Date
2010-03-09
Institut
TORE-DOI
ISBN of container
978-3-86853-407-8
This work describes the development of a micro-mass-spectrometer with the methods of microsystem technologies. All components of the mass spectrometer are combined in a planar design of a 7 x 10 mm² chip fabricated out of glass and silicon.
This work focuses on the development of the MEMS fabrication and on the operation of a micro-channel-plate (MCP) in a self-aligning fixture structured out of silicon.
This work focuses on the development of the MEMS fabrication and on the operation of a micro-channel-plate (MCP) in a self-aligning fixture structured out of silicon.
Subjects
SIS, MCP, Mikrokanalplatte,
Micro Channel Plate
Mass Spectrometrie
MEMS
Micro System Technology
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Name
Dissertation_Online.pdf
Size
5.58 MB
Format
Adobe PDF