Optofluidic biomolecule sensors based on a-Si:H microrings embedded in silicon-glass microchannels

Journal
Optics letters  
Volume
42
Issue
6
Start Page
1084
End Page
1087
Citation
Optics Letters 6 (42): 1084-1087 (2017)
Publisher DOI
10.1364/OL.42.001084
Scopus ID
2-s2.0-85015397135
Publisher
Soc.
The large-scale and low-cost fabrication of high sensitivity sensors for the real-time detection of biochemicals and molecular substances opens up new opportunities in the areas of bioanalytic screening and medical diagnostics. Planar integrated photonic resonators that can be fabricated with a low footprint, in spatial and wavelength multiplexed arrangements, and that enable integration with microfluidics on the wafer scale have emerged as a promising sensing platform for these application fields. We realized an optofluidic and label-free biosensor that is based on hydrogenated amorphous silicon microring resonators embedded in silicon/glass microfluidic channels for analyte injection and biomolecule immobilization. The optofluidic sensor merits for refractive index and biomolecule sensing are evaluated by sensitivity and detection limit simulations, whereas a proof of concept is demonstrated by real-time protein immobilization experiments of functionalized resonators.
DDC Class
600: Technik