Passive micro check valves in glass manufactured by selective laser etching

Publikationstyp
Conference Paper
Publikationsdatum
2023-10-23
Sprache
English
Author
Bohne, Sven 
Mikrosystemtechnik E-7 
Laha, Sibashish
Mikrosystemtechnik E-7 
Trieu, Hoc Khiem 
Mikrosystemtechnik E-7 
TORE-URI
https://hdl.handle.net/11420/46375
Citation
Tagungsband MikroSystemTechnik Kongress 2023, Dresden, 23. - 25. Oktober 2023. - Berlin, 2023.
Contribution to Conference
10. MikroSystemTechnik Kongress 2023 
Scopus ID
2-s2.0-85196910993
Publisher
VDE Verlag
ISBN
978-3-8007-6203-3
978-3-8007-6204-0
Novel passive micro check valves are presented. For many fluidic applications such as complex micro-reactors and labon-chip systems, it is advantageous if an unwanted reversal flow can be prevented without additional energy and control effort. The process flow including design, manufacturing and testing is shown. The new passive micro check valves, as well as the micro-fluidic systems to be protected, are manufactured using the in volume selective laser-induced etching (ISLE) process. The new check valves are designed to allow a beneficial integration into the manufacturing process of 3D glass micro-fluidic systems.
DDC Class
600: Technology
530: Physics
621: Applied Physics