Title: Optical Properties of the Refractory Metals at High Temperatures
Language: English
Authors: Chirumamilla, Manohar 
Arya, Mahima 
Ganguly, Ankita 
Rout, Surya Snata 
Krishnamurthy, Gnanavel Vaidhyanathan 
Krekeler, Tobias 
Ritter, Martin  
Störmer, Michael 
Petrov, Alexander  
Eich, Manfred 
Issue Date: May-2021
Source: Conference on Lasers and Electro-Optics (CLEO 2021)
Abstract (english): 
We measure and compare the optical properties of thin refractory metal films (TiN, W, Mo and Ir) at temperatures up to 1000 °C. In-situ ellipsometry is used to measure the optical constants. Refractory metals show long-term structural stability at 1000 °C for 120 h.
Conference: Conference on Lasers and Electro-Optics, CLEO 2021 
URI: http://hdl.handle.net/11420/11291
ISBN: 978-194358091-0
Institute: Optische und Elektronische Materialien E-12 
Betriebseinheit Elektronenmikroskopie M-26 
Document Type: Chapter/Article (Proceedings)
Appears in Collections:Publications without fulltext

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