Please use this identifier to cite or link to this item: https://doi.org/10.15480/882.1206
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Title: Herstellung und Analyse thermisch oxidierter SOI-Nanowires
Language: German
Authors: Horn, Oliver 
Issue Date: 2014
Examination Date: 26-Jun-2012
URI: http://tubdok.tub.tuhh.de/handle/11420/1208
DOI: 10.15480/882.1206
Institute: Mikrosystemtechnik E-7 
Faculty: Elektrotechnik und Informationstechnik
Type: Dissertation
Advisor: Müller, Jörg 
Thesis grantor: Technische Universität Hamburg
License: http://doku.b.tu-harburg.de/doku/lic_ohne_pod.php
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