Publisher DOI: 10.1109/GROUP4.2017.8082198
Title: Manufacturing variability estimations for deposited silicon photonic circuits
Language: English
Authors: Lipka, Timo 
Trieu, Hoc Khiem 
Keywords: Manufacturing quality amorphous silicon (a-Si:H);Microring resonators;Photonic integrated circuits
Issue Date: 26-Oct-2017
Publisher: IEEE
Source: 14th International Conference on Group IV Photonics, GFP 2017: 65-66 (2017)
Abstract (english): We present a comprehensive study of deposited silicon microring resonators for photonic-integrated circuitry. Refractive index, thickness, and widths variations are estimated. The statistical deviations are sufficiently low to realize photonic circuits of high quality for instance deposited on various substrates and integrated with heterogeneous materials.
Conference: 14th International Conference on Group IV Photonics, GFP 2017 
URI: http://hdl.handle.net/11420/3750
ISBN: 978-1-5090-6568-4
Institute: Mikrosystemtechnik E-7 
Type: InProceedings (Aufsatz / Paper einer Konferenz etc.)
Project: Biosensor auf Basis integrierter Photonik 
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