Lipka, TimoTimoLipkaKiepsch, MelanieMelanieKiepschTrieu, Hoc KhiemHoc KhiemTrieuMüller, JörgJörgMüller2021-07-212021-07-212014Optics Express 22 (10): 12122-12132 (2014)http://hdl.handle.net/11420/9945A method to compensate for fabrication tolerances and to fine-tune individual photonic circuit components is inevitable for waferscale photonic systems even with most-advanced CMOS-fabrication tools. We report a cost-effective and highly accurate method for the permanent trimming of hydrogenated amorphous silicon photonic devices by UV-irradiation. Microring resonators and Mach-Zehnder-interferometers were utilized as photonic test devices. The MZIs were tuned forth and back over their complete free spectral range of 5.5 nm by locally trimming the two MZI-arms. The trimming range exceeds 8 nm for compact ring resonators with trimming accuracies of 20pm. Trimming speeds of ≥ 10 GHz/s were achieved. The components did not show any substantial device degradation. © 2014 Optical Society of America.en1094-40872014101212212132Optical Society of AmericaPhysikJournal Article10.1364/OE.22.012122Other