Lipka, TimoTimoLipkaTrieu, Hoc KhiemHoc KhiemTrieu2019-11-072019-11-072017-10-2614th International Conference on Group IV Photonics, GFP 2017: 65-66 (2017)http://hdl.handle.net/11420/3750We present a comprehensive study of deposited silicon microring resonators for photonic-integrated circuitry. Refractive index, thickness, and widths variations are estimated. The statistical deviations are sufficiently low to realize photonic circuits of high quality for instance deposited on various substrates and integrated with heterogeneous materials.enH)Microring resonatorsPhotonic integrated circuitsTechnikManufacturing variability estimations for deposited silicon photonic circuitsConference Paper10.1109/GROUP4.2017.8082198Other