Annuth, RobertRobertAnnuthHölzl, WolfgangWolfgangHölzlBosetti, GabrieleGabrieleBosettiSchrag, GabrieleGabrieleSchrag2025-01-162025-01-16202123rd Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP 2021)https://tore.tuhh.de/handle/11420/53273We investigate a micromechanical bending actuator that generates a fluid flow through piezoelectric excitation of segmented electrodes. The bio-inspired structure is supposed to wave like the caudal fin of fish (the so-called undulatory movement), as the movement pattern enables a high degree of efficiency. We have developed a method to optimize the electrical stimulation of the actuator and thus evoke undulatory movement. As a result, we can describe the relationship between electrical stimulation and the resulting movement of the structure. We successfully validated the results of this approach by laser interferometry measurements.enTechnology::621: Applied Physics::621.3: Electrical Engineering, Electronic EngineeringSocial Sciences::333: Economics of Land and Energy::333.7: Natural Resources, Energy and EnvironmentConference Paper10.1109/DTIP54218.2021.9568497Conference Paper