Adaptive microsystems with optical line sensors for measurement and quality control

Martiny, IngoIngoMartinyGrigat, Rolf-RainerRolf-RainerGrigat2021-09-102021-09-101995SPIE's 1995 International Symposium on Optical Science, Engineering and Instrumentation, San Diego, California, 9.-14. Juli 1995http://hdl.handle.net/11420/10321enPhysikTechnikIngenieurwissenschaftenAdaptive microsystems with optical line sensors for measurement and quality controlConference PaperOther