Lipka, TimoTimoLipkaAmthor, JuliaJuliaAmthorMüller, Jakob J.Jakob J.Müller2020-06-172020-06-172013Nano-bio sensing, imaging and spectroscopy : 20 - 23 February 2013, Jeju, Republic of Korea / sponsored by Ministry of Education, Science and Technology (Korea, Republic of) ... Shin Won Kang ..., ed. - Bellingham, Wash. : SPIE, 2013. - (Proceedings of SPIE - The International Society for Optical Engineering ; vol. 8879). - Art.-Nr. 88790A (2013)http://hdl.handle.net/11420/6352In this paper we present a low-loss hydrogenated amorphous silicon microdisk resonator which is employed for evanescent field refractive index sensing. The resonances of the whispering gallery modes have extinction ratios of <25dB and Q-factors up to 15000 when covered with aqueous solutions. The sensitivity of the microdisk sensor was experimentally determined to be 460nm/RIU for the qTM-mode with different concentrations of NaCl dispersed in deionized water. From the measurements the resonators intrinsic limit of detection was calculated to be LOD=3.3x10-4 and the minimum detectable amount of NaCl diluted in DI-water was determined to be 0.0375%. The early results prove that photonic microdisk resonators that are fabricated with low-loss hydrogenated amorphous silicon material can be applied in a variety of different areas for label-free lab-on-chip sensing, including chemical, medical and bio-sensing applications. © 2013 SPIE.enhydrogenated amorphous siliconIntegrated opticsphotonic microdiskrefractive index sensorsilicon photonicsPhysikConference Paper10.1117/12.2019502Other