Robust recognition of micro-sized fiducial marks combining position and identification information

Förtsch, Tobias C.Tobias C.Förtschvon Bojničić-Kninski, ClemensClemensvon Bojničić-KninskiShahbaz Khan, M.M.Shahbaz KhanMärkle, FriederFriederMärkleWeber, Laura K.Laura K.WeberFischer, AndreaAndreaFischerMünster, BastianBastianMünsterRidder, BarbaraBarbaraRidderAlthuon, DanielaDanielaAlthuonStriffler, JakobJakobStrifflerSedlmayr, MartynaMartynaSedlmayrBykovskaya, ValentinaValentinaBykovskayaPopov, RomanRomanPopovSoehindrijo, MiriamMiriamSoehindrijoBreitling, FrankFrankBreitlingLoeffler, Felix F.Felix F.LoefflerNesterov-Müller, AlexanderAlexanderNesterov-Müller2026-02-172026-02-172015-10MikroSystemTechnik Kongress 2015978-3-8007-4100-7https://hdl.handle.net/11420/61627The automated recognition of fiducial marks can both be robust and comprise the identification of the work piece, if the marks are designed properly. We have systematically chosen variants of micro-sized marks and present a method suitable for detecting fiducial marks with a micrometer precision and simultaneously coding 33,554,432 ID tags.enTechnology::600: TechnologyRobust recognition of micro-sized fiducial marks combining position and identification informationConference PaperConference Paper