Prorok, StefanStefanProrokPetrov, AlexanderAlexanderPetrovEich, ManfredManfredEichLuo, JingdongJingdongLuoJen, Alex K.-Y.Alex K.-Y.Jen2020-05-052020-05-0520132013 IEEE Photonics Conference, IPC 2013. - Piscataway, NJ : IEEE, 2013. - Art.-Nr. 6656631, i.e. Seite 450-451http://hdl.handle.net/11420/6042We demonstrate a novel method to define high Q silicon photonic crystal cavities with functional polymer cladding with ultra precision using spatially resolved electron beam bleaching of a chromophore doped polymer. © 2013 IEEE.enTechnikIngenieurwissenschaftenConference Paper10.1109/IPCon.2013.6656631Conference Paper