Singer, Julian AlexanderJulian AlexanderSingerGeläschus, Anton UlrichAnton UlrichGeläschusKleinschnittger, PatrickPatrickKleinschnittgerSchmidt, UteUteSchmidtKuhl, MatthiasMatthiasKuhlBahr, AndreasAndreasBahr2025-04-252025-04-252025-0138th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025979-8-3315-0889-0https://hdl.handle.net/11420/55450This paper presents a comprehensive experimental study on photoluminescent oxygen indicators and a rapid prototyping approach to manufacture biocompatible polymer films for future implantable sensors. Combining single photon avalanche diodes (SPADs) in a complementary metal-oxide-semiconductor (CMOS) technology, post-CMOS micro light-emitting diodes (μLEDs), and a photoluminescent layer allows for precise integrated oxygen detectors. To optimize the phosphorescent component, this paper provides extensive data by comparing different indicators, light sources, concentrations, and manufacturing technologies, tailored to the application in patient-specific implants.enBiomedical Implant | Oxygen Sensor | Photoluminescence | Single Photon Avalanche DiodeTechnology::600: TechnologyConference Paper10.1109/MEMS61431.2025.10917709Conference Paper