Ritter, MartinMartinRitterDziomba, ThorstenThorstenDziombaHemmleb, MatthiasMatthiasHemmlebKoenders, LudgerLudgerKoendersKranzmann, AxelAxelKranzmann2023-01-052023-01-052007Mapan - Journal of Metrology Society of India (2007)http://hdl.handle.net/11420/14515en0970-3950Mà„pan2007A 3D-calibration method for the quantitative SPM measurement of hardness indentersJournal ArticleOther