Weckenmann, AlbertAlbertWeckenmannWiedenhöfer, ThomasThomasWiedenhöferButtgenbach, StephanusStephanusButtgenbachKrah, ThomasThomasKrahFleischer, JürgenJürgenFleischerBuchholz, IvesaIvesaBuchholzViering, BenjaminBenjaminVieringKranzmann, AxelAxelKranzmannRitter, MartinMartinRitterKrüger-Sehm, RolfRolfKrüger-SehmBakucz, PeterPeterBakuczSchmitt, RobertRobertSchmittKoerfer, FriedelFriedelKoerfer2023-01-052023-01-052008Technisches Messen 75 (5): 288-297 (2008)http://hdl.handle.net/11420/14514Micro-and nano-metrology permanently need new standards. New approaches in design, production and application have to be developed, in order to fulfil the requirements and boundary conditions of micro-and nano-technology. In the following selected examples for these developments are presented.de0171-8096Technisches Messen20085288297Coordinate metrologyGeometrical micro-and nano-metrologyStandardsTrends in development of standards for micro-and nanometrology: Chances and challengesJournal Article10.1524/teme.2008.0871Journal Article