Kuhne, JuliusJuliusKuhneWeber, ThomasThomasWeberKuhner, LuccaLuccaKuhnerWang, JuanJuanWangTittl, AndreasAndreasTittlMaier, Stefan A.Stefan A.Maier2026-03-192026-03-192021-06Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2021https://hdl.handle.net/11420/62282Photonic bound states in the continuum (BICs) have recently emerged as an exciting toolkit for all-dielectric metasurfaces with sharp resonances and strong near-field enhancements. Specifically, metasurface unit cells with broken in-plane symmetry have unlocked precise control over the linewidth and therefore the quality factor (Q factor) of BIC-based resonances [1]. Combined with tunability over a wide frequency range, this approach has opened up a broad spectrum of applications from biochemical sensing [2] to higher harmonic generation [3].enQ-factorFabricationResonant frequencyEuropeMetasurfacesFrequency conversionSensorsTechnology::600: TechnologyFabrication tolerance impact on BIC metasurface resonancesConference Paper10.1109/CLEO/Europe-EQEC52157.2021.9542668