Amthor, JuliaJuliaAmthorHorn, OliverOliverHornLipka, TimoTimoLipkaSavov, Angel M.Angel M.SavovMüller, JörgJörgMüller2022-08-312022-08-312011-05-27IEEE Photonics Technology Letters 23 (16): 1142-1144 (2011)http://hdl.handle.net/11420/13532en1041-1135IEEE photonics technology letters20111611421144IEEEPhysikTechnikIngenieurwissenschaftenFabrication of freestanding SiO₂-membrane systems for thermo-optic adjusting of SOI photonic wiresJournal Article10.1109/LPT.2011.2157909Other