Lipka, TimoTimoLipkaMakswit, KilianKilianMakswitRennpferdt, LukasLukasRennpferdtVermeer, Matthias L.Matthias L.VermeerTrieu, Hoc KhiemHoc KhiemTrieu2022-01-282022-01-282021-10IEEE Photonics Conference (IPC 2021)http://hdl.handle.net/11420/11589Mitigating tolerances of integrated photonic devices on wafer-scale remains challenging. We demonstrate the permanent bi-directional post-fabrication reconfiguration of deposited silicon photonic circuit components via localized laser irradiation. Microresonators are utilized to investigate the reversibility of spectral shifts and to evaluate such effects on quality factor.enlaser trimmingmicroring resonatorpost-fabrication reconfiguringsilicon photonicsspectral filtersConference Paper10.1109/IPC48725.2021.9593058Other