Betz, WolfgangWolfgangBetzTrieu, Hoc KhiemHoc KhiemTrieuVogt, HolgerHolgerVogt2019-10-182019-10-182012-08-27Biomedizinische Technik Suppl. 1 Track-D (57): 914 (2012-01-01)http://hdl.handle.net/11420/3579en1862-278XBiomedical engineering : joint journal of the German Society for Biomedical Engineering in VDE and the Austrian and Swiss Societies for Biomedical Engineering2012Suppl. 1 Track-D914De GruyterBiowissenschaften, BiologieMicroelectromechanical implants : encapsulation concepts and test proceduresJournal Article10.1515/bmt-2012-4292Other