Riekeberg, SvenjaSvenjaRiekebergQuiring, GrigoriyGrigoriyQuiringMüller, Jakob J.Jakob J.MüllerTrieu, Hoc KhiemHoc KhiemTrieu2021-01-072021-01-072015-10MikroSystemTechnik Kongress 2015, MEMS, Mikroelektronik, Systeme: 44-46 (2015)http://hdl.handle.net/11420/8317Integration of a new carbon-based material - Carbon NanoPillars - In strain gauges In this contribution, a new formation of carbon - Carbon NanoPillars (CNPs) - is introduced. These CNPs are tested for their usedness as base material in strain gauges. The CNP-growing shows a vertically aligned formation of pillared carbon on the carrier substrate. With a metal contacting on both sides of the structured CNP-carped the electron charge is transported along the carped, orthogonally to the CNP growing direction. The CNP based strain gauge shows a linear IU characteristic and a linear resistivity in the temperature range from 20°C to 90°C. The strain gauge exhibits high k-factors of up to 15.5, which is achieved by optimizing the process power of the CNP growth process.deConference PaperOther