Rennpferdt, LukasLukasRennpferdtBohne, SvenSvenBohnePuthanveedu, SreejithSreejithPuthanveeduTrieu, Hoc KhiemHoc KhiemTrieu2026-02-122026-02-12202511. MikroSystemTechnik Kongress 2025https://hdl.handle.net/11420/61531Femtosecond laser structuring of transparent materials is becoming increasingly relevant and useful due to its ability to pattern 3D structures, especially when Micro-Electro-Mechanical-Systems (MEMS) are getting more complex. Similarly, the possibility of integrating waveguides into transparent materials increases the potential of this technology and can further enhance the complexity of manufactured systems. This paper examines femtosecond laser written (FLW) waveguides and identifies challenges in their applicability. In addition, strategies and approaches for enhancing the applicability of waveguides are explored.enTechnology::620: EngineeringEnhancing the applicability of femtosecond laser written waveguides in fused silicaConference Paper10.30420/456614060Conference Paper