Schwarz, FabianFabianSchwarzSenger, FrankFrankSengerAlbers, JörgJörgAlbersMalaurie, PaulinePaulineMalaurieJanicke, ChristianChristianJanickePohl, LeonLeonPohlHeinrich, FelixFelixHeinrichKaden, DIrkDIrkKadenQuenzer, Hans JoachimHans JoachimQuenzerLofink, FabianFabianLofinkBahr, AndreasAndreasBahrWantoch, Thomas vonThomas vonWantochHofmann, UlrichUlrichHofmann2022-05-302022-05-302020-02Proceedings of SPIE - The International Society for Optical Engineering 11293: 1129309, 1-17 (2020)http://hdl.handle.net/11420/12739Presented here is the world's first resonant 1D MEMS mirror achieving mechanical scanning angles exceeding ±45° and thus providing a field of view of up to 180°. The MEMS scanner features a 2 mm x 4 mm ellipsoid mirror plate and oscillates at a scan frequency of about 1.5 kHz. Integrated sensors and closed-loop control allow for an accurate position detection below 0.1°. To achieve the scan angles as well as to guarantee long lifetime and reliability, the MEMS mirror is hermetically sealed on wafer level by a dedicated glass cover and operated in vacuum.enLarge field of viewLarge scan angleLiDARMEMSMEMS-mirrorMicro-mirrorMicro-scannerMOEMSInformatikTechnikConference Paper10.1117/12.2546035Other