Lipka, TimoTimoLipkaMoldenhauer, LennartLennartMoldenhauerMirbach-Wahn, Lennart vonLennart vonMirbach-WahnTrieu, Hoc KhiemHoc KhiemTrieu2019-11-072019-11-072017-03-06Optics Letters 6 (42): 1084-1087 (2017)http://hdl.handle.net/11420/3748The large-scale and low-cost fabrication of high sensitivity sensors for the real-time detection of biochemicals and molecular substances opens up new opportunities in the areas of bioanalytic screening and medical diagnostics. Planar integrated photonic resonators that can be fabricated with a low footprint, in spatial and wavelength multiplexed arrangements, and that enable integration with microfluidics on the wafer scale have emerged as a promising sensing platform for these application fields. We realized an optofluidic and label-free biosensor that is based on hydrogenated amorphous silicon microring resonators embedded in silicon/glass microfluidic channels for analyte injection and biomolecule immobilization. The optofluidic sensor merits for refractive index and biomolecule sensing are evaluated by sensitivity and detection limit simulations, whereas a proof of concept is demonstrated by real-time protein immobilization experiments of functionalized resonators.en0146-95922017610841087Soc.TechnikJournal Article10.1364/OL.42.001084Other