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Item type:Publication, Access status: with files , Wafer-scale fabrication of hierarchically porous silicon and silica by active nanoparticle-assisted chemical etching and pseudomorphic thermal oxidation(Wiley-VCH, 2023-06-01); ; ; ; Many biological materials exhibit a multiscale porosity with small, mostly nanoscale pores as well as large, macroscopic capillaries to simultaneously achieve optimized mass transport capabilities and lightweight structures with large inner surfaces. Realizing such a hierarchical porosity in artificial materials necessitates often sophisticated and expensive top-down processing that limits scalability. Here, an approach that combines self-organized porosity based on metal-assisted chemical etching (MACE) with photolithographically induced macroporosity for the synthesis of single-crystalline silicon with a bimodal pore-size distribution is presented, i.e., hexagonally arranged cylindrical macropores with 1 µm diameter separated by walls that are traversed by pores 60 nm across. The MACE process is mainly guided by a metal-catalyzed reduction–oxidation reaction, where silver nanoparticles (AgNPs) serve as the catalyst. In this process, the AgNPs act as self-propelled particles that are constantly removing silicon along their trajectories. High-resolution X-ray imaging and electron tomography reveal a resulting large open porosity and inner surface for potential applications in high-performance energy storage, harvesting and conversion or for on-chip sensorics and actuorics. Finally, the hierarchically porous silicon membranes can be transformed structure-conserving by thermal oxidation into hierarchically porous amorphous silica, a material that could be of particular interest for opto-fluidic and (bio-)photonic applications due to its multiscale artificial vascularization.Publicationtype: Journal ArticleScopus© Citations 1 70 82 - Some of the metrics are blocked by yourconsent settings
Item type:Publication, Access status: with files , How nanoporous silicon-polypyrrole hybrids flex their muscles in aqueous electrolytes: in operando high-resolution x-ray diffraction and electron tomography-based micromechanical computer simulations(American Physical Society (APS), 2022-11-28); ; ; ; Macroscopic strain experiments have revealed that silicon crystals traversed by parallel, channel-like nanopores functionalized with the artificial muscle polymer polypyrrole (PPy) exhibit large and reversible electrochemomechanical actuation in aqueous electrolytes. On a macroscopic scale these actuation properties are well understood. However, on the microscopical level this system still bears open questions, as to how the electrochemical expansion and contraction of PPy acts on to np-Si pore walls and how the collective motorics of the pore array emerges from the single-nanopore behavior. Here we present synchrotron-based, in operando x-ray diffraction on the evolving electrostrains in epilayers of this material grown on bulk silicon. An analysis of these experiments with micromechanical finite-element simulations, that are based on a full three-dimensional reconstruction of the nanoporous medium by transmission electron microscopy (TEM) tomography, shows that the in-plane mechanical response is dominantly isotropic despite the anisotropic elasticity of the single-crystalline host matrix. However, the structural anisotropy originating from the parallel alignment of the nanopores led to significant differences between the in- and out-of-plane electromechanical response. This response is not describable by a simple two-dimensional arrangement of parallel cylindrical channels. Rather, the simulations highlight that the dendritic shape of the silicon pore walls, including pore connections between the main channels, causes complex, highly inhomogeneous stress-strain fields in the crystalline host. Time-dependent x-ray scattering experiments on the dynamics of the actuator properties hint towards the importance of diffusion limitations, plastic deformation, and creep in the nanoconfined polymer upon (counter)ion adsorption and desorption, the very pore-scale processes causing the macroscopic electroactuation. From a more general perspective, our study demonstrates that the combination of TEM tomography-based micromechanical modeling with high-resolution x-ray scattering experiments provides a powerful approach for in operando analysis of nanoporous composites from the single nanopore up to the porous-medium scale.Publicationtype: Journal ArticleScopus© Citations 5 54 54