100 GHz reflectometer for sensitivity analysis of MEMS sensors comprising an intermediate frequency Six-port receiver

Start Page
20
End Page
22
Article Number
7127403
Citation
IEEE Topical Conference on Wireless Sensors and Sensor Networks, WiSNet: 7127403 (2015-01)
Contribution to Conference
IEEE Topical Conference on Wireless Sensors and Sensor Networks, WiSNet 2015  
Publisher DOI
10.1109/WISNET.2015.7127403
Due to the growing market for Micro Electro Mechanical Systems (MEMS), especially for the application in mobile electronic devices like cameras, phones or tablet computers, cost and time efficient test and evaluation systems are required for the production process. This work presents a novel measurement setup for MEMS microphones, that allows an inline, contactless evaluation of the microphones' mechanical sensitivity at an early stage of the manufacturing process. A heterodyne receiver with a Six-port demodulator is deployed for displacement detection with micrometer resolution. Since the Six-port demodulator allows very high sampling rates, only limited by the analog-to-digital converter, short measurement times can be achieved.
Subjects
Contactless Testing
Mechanical Sensitivity
MEMS
Microwave Interferometer
Pull-in
Six-port
W-band