Optical Properties of the Refractory Metals at High Temperatures

Publikationstyp

Conference Paper

Date Issued

2021-05

Sprache

English

Author(s)

Chirumamilla, Manohar

Ganguly, Ankita

Rout, Surya Snata

Krishnamurthy, Gnanavel Vaidhyanathan

Krekeler, Tobias

Störmer, Michael

Petrov, Alexander

Institut

Optische und Elektronische Materialien E-12

Betriebseinheit Elektronenmikroskopie M-26

TORE-URI

http://hdl.handle.net/11420/11291

Citation

Conference on Lasers and Electro-Optics (CLEO 2021)

Contribution to Conference

Conference on Lasers and Electro-Optics, CLEO 2021

Scopus ID

2-s2.0-85120504772

We measure and compare the optical properties of thin refractory metal films (TiN, W, Mo and Ir) at temperatures up to 1000 °C. In-situ ellipsometry is used to measure the optical constants. Refractory metals show long-term structural stability at 1000 °C for 120 h.