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  4. Configurable silicon photonics with electron beam bleaching
 
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Configurable silicon photonics with electron beam bleaching

Publikationstyp
Conference Paper
Date Issued
2013-10-24
Sprache
English
Author(s)
Petrov, Alexander  orcid-logo
Prorok, Stefan  
Eich, Manfred  
Luo, Jingdong  
Jen, Alex K.-Y.  
Institut
Optische und Elektronische Materialien E-12  
TORE-URI
http://hdl.handle.net/11420/5693
Start Page
13
End Page
14
Article Number
6644466
Citation
IEEE International Conference on Group IV Photonics GFP (2013): Art.-Nr. 6644466 13-14 (2013)
Contribution to Conference
2013 IEEE 10th International Conference on Group IV Photonics (GFP) : 28 - 30 Aug. 2013, Seoul, Korea; IEEE Photonics Society  
Publisher DOI
10.1109/Group4.2013.6644466
Scopus ID
2-s2.0-84891126202
A concept is proposed and realized for post-fabrication trimming as well as new structures fabrication on functionalized silicon platform. Electron beam bleaching of a chromophore doped polymer cladding is applied. © 2013 IEEE.
DDC Class
620: Ingenieurwissenschaften
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