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Configurable silicon photonics with electron beam bleaching
Publikationstyp
Conference Paper
Date Issued
2013-10-24
Sprache
English
TORE-URI
Start Page
13
End Page
14
Article Number
6644466
Citation
IEEE International Conference on Group IV Photonics GFP (2013): Art.-Nr. 6644466 13-14 (2013)
Publisher DOI
Scopus ID
A concept is proposed and realized for post-fabrication trimming as well as new structures fabrication on functionalized silicon platform. Electron beam bleaching of a chromophore doped polymer cladding is applied. © 2013 IEEE.
DDC Class
620: Ingenieurwissenschaften