Robust recognition of micro-sized fiducial marks combining position and identification information
Publikationstyp
Conference Paper
Date Issued
2015-10
Sprache
English
Author(s)
Förtsch, Tobias C.
Shahbaz Khan, M.
Märkle, Frieder
Münster, Bastian
Althuon, Daniela
Soehindrijo, Miriam
Nesterov-Müller, Alexander
Start Page
748
End Page
750
Citation
MikroSystemTechnik Kongress 2015
Contribution to Conference
Scopus ID
Publisher
VDE Verlag
ISBN
978-3-8007-4100-7
The automated recognition of fiducial marks can both be robust and comprise the identification of the work piece, if the marks are designed properly. We have systematically chosen variants of micro-sized marks and present a method suitable for detecting fiducial marks with a micrometer precision and simultaneously coding 33,554,432 ID tags.
DDC Class
600: Technology