A practical approach to test the scope of FIB-SEM 3D reconstruction

State-of-the-art focused ion beam (FIB) instruments have an ion column for sample modification and an electron column for scanning electron microscopy (SEM). 3D reconstruction of a sample volume can be achieved by serial sectioning using the FIB in combination with high-resolution SEM imaging of each cross-section. Usually, the resolution in the direction in which the sections are milled (z-direction) is much lower than in the plane of the cross-section (xy-direction) itself. Increased sampling in the z-direction can only be achieved by decreasing the distance between single sections. For a constant volume this is equivalent to increasing the number of sections, i.e. time and effort. To perform efficient 3D reconstructions the effect of the reduced sampling in the z-direction to the overall accuracy of the 3D reconstruction has to be known. We tested this approach with FIB conical test structures that were slice-and-view processed and subsequently reconstructed. Using a reference data set with a slice thickness (z-resolution) of 22 nm, data with z-resolutions ranging from 44 nm to 440 nm were created and reconstructed with commercial software. The calculated volumes for the simulated z-resolutions and their deviations from the reference volume are shown. Deviations of up to 35% occur and reach about 10% once the z-resolution was one fifth of the upper diameter of the conical structures.

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A practical approach to test the scope of FIB-SEM 3D reconstruction