Permittivity reduction and surface modification by porosification of LTCC

Journal
Ceramics international  
Volume
42
Issue
7
Start Page
8925
End Page
8931
Citation
Ceramics International 7 (42): 8925-8931 (2016-05-15)
Publisher DOI
10.1016/j.ceramint.2016.02.149
The wet-chemical porosification of low temperature co-fired ceramics is investigated with respect to the resulting permittivity reduction and surface modification. Therefore, four commercially available tapes are characterized by means of a detuned ring resonator as well as by chromatic white light and scanning electron microscopy analyses. The results show a technically relevant permittivity reduction of about 15% to 18% measured at a frequency of 44 GHz. Thereby, the vertical distribution of the air, embedded by the porosification, is of high influence. The achievable reduction in permittivity strongly counteracts the surface quality, which is necessary for applying high quality metallization lines.
Subjects
LTCC
Permittivity reduction
Porosification
Surface