Trends in development of standards for micro-and nanometrology: Chances and challenges

Journal
Technisches Messen  
Volume
75
Issue
5
Start Page
288
End Page
297
Citation
Technisches Messen 75 (5): 288-297 (2008)
Publisher DOI
10.1524/teme.2008.0871
Scopus ID
2-s2.0-67651012852
Micro-and nano-metrology permanently need new standards. New approaches in design, production and application have to be developed, in order to fulfil the requirements and boundary conditions of micro-and nano-technology. In the following selected examples for these developments are presented.
Subjects
Coordinate metrology
Geometrical micro-and nano-metrology
Standards