Fabrication of freestanding SiO₂-membrane systems for thermo-optic adjusting of SOI photonic wires

Journal
IEEE photonics technology letters  
Volume
23
Issue
16
Start Page
1142
End Page
1144
Citation
IEEE Photonics Technology Letters 23 (16): 1142-1144 (2011)
Publisher DOI
10.1109/LPT.2011.2157909
Publisher
IEEE
DDC Class
530: Physik
600: Technik
620: Ingenieurwissenschaften