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  4. Fabrication of freestanding SiO₂-membrane systems for thermo-optic adjusting of SOI photonic wires

Fabrication of freestanding SiO₂-membrane systems for thermo-optic adjusting of SOI photonic wires

Publikationstyp
Journal Article
Date Issued
2011-05-27
Sprache
English
Author(s)
Amthor, Julia
Horn, Oliver
Lipka, Timo
Savov, Angel M.
Müller, Jörg
Institut
Mikrosystemtechnik E-7
TORE-URI
http://hdl.handle.net/11420/13532
Journal
IEEE photonics technology letters
Volume
23
Issue
16
Start Page
1142
End Page
1144
Citation
IEEE Photonics Technology Letters 23 (16): 1142-1144 (2011)
Publisher DOI
10.1109/LPT.2011.2157909
Publisher
IEEE
DDC Class
530: Physik
600: Technik
620: Ingenieurwissenschaften
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