Template based one-dimensional sensing nanostructures grown by atomic layer deposition

Publikationstyp
Conference Paper
Date Issued
2016
Sprache
English
Author(s)
Schulz, Norbert  
Riekeberg, Svenja  
Trieu, Hoc Khiem  
Institut
Mikrosystemtechnik E-7  
TORE-URI
http://hdl.handle.net/11420/8879
Start Page
179
End Page
181
Citation
Mikro-Nano-Integration - 6. GMM-Workshops (2016)
Contribution to Conference
Mikro-Nano-Integration - 6. GMM-Workshops (2016)  
Scopus ID
2-s2.0-85100550900
In this contribution, an innovative fabrication process for one-dimensional (1D) nanostructures for sensing purposes is introduced. The fabrication process is based on the complete covering of different templates by thin layers of active sensing material grown by atomic layer deposition (ALD). The geometry of the sensing structures is predetermined by the geometry of the patterns embedded in the respectively used templates. ALD is the deposition process of choice, since the resulting thin layers with good step coverage and high conformity are well suited for reproducing the high aspect ratios of those patterns.