Travelling wave resonators fabricated with low-loss hydrogenated amorphous silicon

Publikationstyp
Conference Paper
Publikationsdatum
2013
Sprache
English
Author
Lipka, Timo 
Amthor, Julia 
Trieu, Hoc Khiem 
Müller, Jörg 
Institut
Mikrosystemtechnik E-7 
TORE-URI
http://hdl.handle.net/11420/6587
Article Number
876707
Citation
Integrated photonics: materials, devices, and applications II : 24 - 26 April 2011, Grenoble, France ; [part of SPIE microtechnologies] / sponsored and publ. by SPIE. Jean-Marc Fédéli ..., ed. - Bellingham, Wash. : SPIE, 2013. - (Proceedings of SPIE ; 8767). - Artikel Nr. 876707
Contribution to Conference
Integrated photonics: materials, devices, and applications II, Grenoble 2013 
Publisher DOI
10.1117/12.2018509
Scopus ID
2-s2.0-84881175318
Publisher
SPIE
Low-loss hydrogenated amorphous silicon is employed for the fabrication of various planar integrated travelling wave resonators. Microring, racetrack, and disk resonators of different dimensions were fabricated with CMOS-compatible processes and systematically investigated. The key properties of notch filter ring resonators as extinction ratio, Q-factor, free spectral range, and the group refractive index were determined for resonators of varying radius, thereby achieving critically coupled photonic systems with high extinction ratios of about 20dB for both polarizations. Racetrack resonators that are arranged in add/drop configuration and high quality factor microdisk resonators were optically characterized, with the microdisks exhibiting Q-factors of greater than 100000. Four-channel add/drop wavelength-division multiplexing filters that are based on cascaded racetrack resonators are studied. The design, the fabrication, and the optical characterization are presented. © 2013 SPIE.
Schlagworte
A-si:H
Amorphous silicon
Dielectric waveguides
Integrated optics
Microdisk
Microring
Photonics
Racetrack
WDM
DDC Class
530: Physik
600: Technik
620: Ingenieurwissenschaften