The design of a fully differential capacitive pressure sensor with unbalanced parasitic input capacitances in 130nm CMOS technology

Start Page
137
End Page
142
Citation
Biodevices 2013 : International Conference on Biomedical Electronics and Devices ; Barcelona, Spain, 11 - 14 February 2013 ; [integrated in BIOSTEC (International Joint Conference on Biomedical Engineering Systems and Technologies)] / sponsored by INSTICC - Institute for Systems and Technologies of Information, Control and Communication. [Ed. by Mireya Fernández Chimeno ...]. - [S.l.] : SciTePress, 2013. - Seite 137-142
Contribution to Conference
BIODEVICES 2013, International Conference on Biomedical Electronics and Devices  
Publisher
SciTePress
A switched capacitor amplifier for measuring absolute pressure with a micro-machined capacitive pressure sensor using correlated double sampling has been designed in 130nm CMOS technology. The switched capacitor amplifier design uses a combination of correlated double sampling, input offset cancellation, and output offset cancellation to help reject 1/f noise and DC offset mismatch. A method for sizing the operational transconductance amplifier (OTA) components according to the system noise, accuracy, and bandwidth requirements is presented.
Subjects
Capacitive pressure sensor
Correlated double sampling
SC noise analysis
DDC Class
570: Biowissenschaften, Biologie
610: Medizin
620: Ingenieurwissenschaften