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Integration eines neuartigen kohlenstoffbasierten Materials - Carbon NanoPillars - In Dehnungsmessstreifen
Other Titles
Integration of a new carbon-based material - Carbon NanoPillars - In strain gauges
Publikationstyp
Conference Paper
Date Issued
2015-10
Sprache
German
Institut
TORE-URI
Start Page
44
End Page
46
Citation
MikroSystemTechnik Kongress 2015, MEMS, Mikroelektronik, Systeme: 44-46 (2015)
Contribution to Conference
Scopus ID
Integration of a new carbon-based material - Carbon NanoPillars - In strain gauges
In this contribution, a new formation of carbon - Carbon NanoPillars (CNPs) - is introduced. These CNPs are tested for their usedness as base material in strain gauges. The CNP-growing shows a vertically aligned formation of pillared carbon on the carrier substrate. With a metal contacting on both sides of the structured CNP-carped the electron charge is transported along the carped, orthogonally to the CNP growing direction. The CNP based strain gauge shows a linear IU characteristic and a linear resistivity in the temperature range from 20°C to 90°C. The strain gauge exhibits high k-factors of up to 15.5, which is achieved by optimizing the process power of the CNP growth process.
In this contribution, a new formation of carbon - Carbon NanoPillars (CNPs) - is introduced. These CNPs are tested for their usedness as base material in strain gauges. The CNP-growing shows a vertically aligned formation of pillared carbon on the carrier substrate. With a metal contacting on both sides of the structured CNP-carped the electron charge is transported along the carped, orthogonally to the CNP growing direction. The CNP based strain gauge shows a linear IU characteristic and a linear resistivity in the temperature range from 20°C to 90°C. The strain gauge exhibits high k-factors of up to 15.5, which is achieved by optimizing the process power of the CNP growth process.