Resonant 1D MEMS mirror with a total optical scan angle of 180° for automotive LiDAR

First published in
Proceedings of SPIE 
Number in series
11293
Start Page
1
End Page
17
Article Number
1129309
Citation
Proceedings of SPIE - The International Society for Optical Engineering 11293: 1129309, 1-17 (2020)
Contribution to Conference
MOEMS and Miniaturized Systems XIX, 2020 
Publisher DOI
10.1117/12.2546035
Scopus ID
2-s2.0-85084177624
Publisher
SPIE
Presented here is the world's first resonant 1D MEMS mirror achieving mechanical scanning angles exceeding ±45° and thus providing a field of view of up to 180°. The MEMS scanner features a 2 mm x 4 mm ellipsoid mirror plate and oscillates at a scan frequency of about 1.5 kHz. Integrated sensors and closed-loop control allow for an accurate position detection below 0.1°. To achieve the scan angles as well as to guarantee long lifetime and reliability, the MEMS mirror is hermetically sealed on wafer level by a dedicated glass cover and operated in vacuum.
Schlagworte
Large field of view
Large scan angle
LiDAR
MEMS
MEMS-mirror
Micro-mirror
Micro-scanner
MOEMS
DDC Class
004: Informatik
600: Technik