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  4. Resonant 1D MEMS mirror with a total optical scan angle of 180° for automotive LiDAR
 
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Resonant 1D MEMS mirror with a total optical scan angle of 180° for automotive LiDAR

Publikationstyp
Conference Paper
Date Issued
2020-02
Sprache
English
Author(s)
Schwarz, Fabian  
Senger, Frank  
Albers, Jörg  
Malaurie, Pauline  
Janicke, Christian  
Pohl, Leon  
Heinrich, Felix  
Kaden, DIrk  
Quenzer, Hans Joachim  
Lofink, Fabian  
Bahr, Andreas  
Wantoch, Thomas von  
Hofmann, Ulrich  
TORE-URI
http://hdl.handle.net/11420/12739
First published in
Proceedings of SPIE  
Number in series
11293
Start Page
1
End Page
17
Article Number
1129309
Citation
Proceedings of SPIE - The International Society for Optical Engineering 11293: 1129309, 1-17 (2020)
Contribution to Conference
MOEMS and Miniaturized Systems XIX, 2020  
Publisher DOI
10.1117/12.2546035
Scopus ID
2-s2.0-85084177624
Publisher
SPIE
Presented here is the world's first resonant 1D MEMS mirror achieving mechanical scanning angles exceeding ±45° and thus providing a field of view of up to 180°. The MEMS scanner features a 2 mm x 4 mm ellipsoid mirror plate and oscillates at a scan frequency of about 1.5 kHz. Integrated sensors and closed-loop control allow for an accurate position detection below 0.1°. To achieve the scan angles as well as to guarantee long lifetime and reliability, the MEMS mirror is hermetically sealed on wafer level by a dedicated glass cover and operated in vacuum.
Subjects
Large field of view
Large scan angle
LiDAR
MEMS
MEMS-mirror
Micro-mirror
Micro-scanner
MOEMS
DDC Class
004: Informatik
600: Technik
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