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A finite 3D field simulation method for permittivity gradient implementation of a novel porosification process in LTCC
Publikationstyp
Conference Paper
Date Issued
2013-12-01
Sprache
English
TORE-URI
Article Number
6697583
Citation
IEEE MTT-S International Microwave Symposium Digest: 6697583 (2013-12-01)
Contribution to Conference
Publisher DOI
High frequency substrates show a manifold variety of complex permittivities for different applications. Recent research results demonstrated the possibility of local decrease of the permittivity on LTCC by chemical etching processes, which enables the design of high quality antennas on LTCC. This paper shows a novel approach on the determination of the quantitative reduction of the effective permittivity by scanning electron microscope analyses in combination with finite 3D field simulations of the resulting inhomogeneous material. By the characterization of two different porosified LTCCs it could be shown that this process is suitable for direct antenna integration on glass-ceramic substrates with enhanced values of relative permittivities.
Subjects
Field simulation
Inhomogeneous substrate
Local reduction of permittivity
LTCC
Permittivity gradient
Porosification
Wet chemical etching