Hard x-ray stereo ptychography with multislicing

Our newly developed technique of stereoscopic ptychography allows us to scan the sample simultaneously with two nanofocused x-ray beams at different angles. The stereoscopic views can, similar to human vision, considerably improve the in-depth perception beyond current limits of pure 2D imaging systems using single optics. We achieved a sub-30nm lateral resolution and are able to recover phase images of two sample layers, which are separated by less than 500nm, based on stereo projections. With stereo ptychography we improved the depth resolution by one order of magnitude compared to the established multi-slice ptychography. Here, we take these capabilities a step further by applying them to thicker samples. This is done by combining layer recovery through stereo imaging with multislice ptychography.

Subjects

Stereo imaging

X-ray microscopy

DDC Class

621.3: Electrical Engineering, Electronic Engineering

Options

Hard x-ray stereo ptychography with multislicing