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High speed micro scanner for 3D in-volume laser micro processing
Publikationstyp
Conference Paper
Publikationsdatum
2013-02
Sprache
English
First published in
Number in series
8608
Article Number
860808
Citation
Proceedings of SPIE - The International Society for Optical Engineering 8608: 860808 (2013)
Contribution to Conference
Publisher DOI
Scopus ID
Publisher
SPIE
Using an in-house developed micro scanner three-dimensional micro components and micro fluidic devices in fused silica are realized using the ISLE process (in-volume selective laser-induced etching). With the micro scanner system the potential of high average power femtosecond lasers (P > 100 W) is exploited by the fabrication of components with micrometer precision at scan speeds of several meters per second. A commercially available galvanometer scanner is combined with an acousto-optical and/or electro-optical beam deflector and translation stages. For focusing laser radiation high numerical aperture microscope objectives (NA > 0.3) are used generating a focal volume of a few cubic micrometers. After laser exposure the materials are chemically wet etched in aqueous solution. The laser-exposed material is etched whereas the unexposed material remains nearly unchanged. Using the described technique called ISLE the fabrication of three-dimensional micro components, micro holes, cuts and channels is possible with high average power femtosecond lasers resulting in a reduced processing time for exposure. By developing the high speed micro scanner up-scaling of the ISLE process is demonstrated. The fabricated components made out of glass can be applied in various markets like biological and medical diagnostics as well as in micro mechanics.
Schlagworte
Femtosecond laser radiation
Glass materials
High speed micro scanner
In-volume selective laser-induced etching
Micro components
DDC Class
530: Physik