Publisher DOI: | 10.1109/IPC48725.2021.9593058 | Title: | Permanent Bi-directional Wavelength Shifting of Photonic Microresonators via Laser Trimming | Language: | English | Authors: | Lipka, Timo Makswit, Kilian Rennpferdt, Lukas Vermeer, Matthias L. Trieu, Hoc Khiem |
Keywords: | laser trimming; microring resonator; post-fabrication reconfiguring; silicon photonics; spectral filters | Issue Date: | Oct-2021 | Source: | IEEE Photonics Conference (IPC 2021) | Abstract (english): | Mitigating tolerances of integrated photonic devices on wafer-scale remains challenging. We demonstrate the permanent bi-directional post-fabrication reconfiguration of deposited silicon photonic circuit components via localized laser irradiation. Microresonators are utilized to investigate the reversibility of spectral shifts and to evaluate such effects on quality factor. |
Conference: | IEEE Photonics Conference, IPC 2021 | URI: | http://hdl.handle.net/11420/11589 | ISBN: | 9781665416016 | Institute: | Mikrosystemtechnik E-7 | Document Type: | Chapter/Article (Proceedings) |
Appears in Collections: | Publications without fulltext |
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