Publisher DOI: 10.1109/IPC48725.2021.9593058
Title: Permanent Bi-directional Wavelength Shifting of Photonic Microresonators via Laser Trimming
Language: English
Authors: Lipka, Timo 
Makswit, Kilian 
Rennpferdt, Lukas 
Vermeer, Matthias L. 
Trieu, Hoc Khiem 
Keywords: laser trimming; microring resonator; post-fabrication reconfiguring; silicon photonics; spectral filters
Issue Date: Oct-2021
Source: IEEE Photonics Conference (IPC 2021)
Abstract (english): 
Mitigating tolerances of integrated photonic devices on wafer-scale remains challenging. We demonstrate the permanent bi-directional post-fabrication reconfiguration of deposited silicon photonic circuit components via localized laser irradiation. Microresonators are utilized to investigate the reversibility of spectral shifts and to evaluate such effects on quality factor.
Conference: IEEE Photonics Conference, IPC 2021 
ISBN: 9781665416016
Institute: Mikrosystemtechnik E-7 
Document Type: Chapter/Article (Proceedings)
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