|Publisher DOI:||10.1109/IPC48725.2021.9593058||Title:||Permanent Bi-directional Wavelength Shifting of Photonic Microresonators via Laser Trimming||Language:||English||Authors:||Lipka, Timo
Vermeer, Matthias L.
Trieu, Hoc Khiem
|Keywords:||laser trimming; microring resonator; post-fabrication reconfiguring; silicon photonics; spectral filters||Issue Date:||Oct-2021||Source:||IEEE Photonics Conference (IPC 2021)||Abstract (english):||
Mitigating tolerances of integrated photonic devices on wafer-scale remains challenging. We demonstrate the permanent bi-directional post-fabrication reconfiguration of deposited silicon photonic circuit components via localized laser irradiation. Microresonators are utilized to investigate the reversibility of spectral shifts and to evaluate such effects on quality factor.
|Conference:||IEEE Photonics Conference, IPC 2021||URI:||http://hdl.handle.net/11420/11589||ISBN:||9781665416016||Institute:||Mikrosystemtechnik E-7||Document Type:||Chapter/Article (Proceedings)|
|Appears in Collections:||Publications without fulltext|
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