Please use this identifier to cite or link to this item: https://doi.org/10.15480/336.4620
Title: Wafer-Scale Fabrication of Hierarchically Porous Silicon and Silica by Active Nanoparticle-Assisted Chemical Etching and Pseudomorphic Thermal Oxidation
Language: English
Authors: Gries, Stella Inge Martha  
Brinker, Manuel  
Zeller-Plumhoff, Berit 
Rings, Dagmar 
Krekeler, Tobias 
Greving, Imke 
Huber, Patrick  
Institutional Data Collector: Deutsches Elektronen-Synchrotron (DESY) 
Helmholtz-Zentrum Hereon 
Keywords: porous silicon; silica; hierarchical porosity; metal-assisted chemical etching; silver nanoparticles
Issue Date: 25-Oct-2022
Abstract (english): 
Dataset containing analysis on a hierarchical porous silicon structure. The structure consists of 1µm macropores hexagonally arranged and interconnected by mesopores in the range of 60nm. Included are a scanning electron micrograph of an overview of the macroporous structure which can be analysed to obtain structural properties such as the pore diameter, surface roughness, surface area and pore volume. Also included are reconstructed transmission electron microscopy and transmission x-ray microscopy tomography data to analyse the same structural parameters on smaller and larger length scale, respectively.
URI: http://hdl.handle.net/11420/13708
DOI: 10.15480/336.4620
Institute: Material- und Röntgenphysik M-2 
Document Type: Dataset
Project: SFB 986: Teilprojekt B07 - Polymere in grenzflächenbestimmten Geometrien: Struktur, Dynamik und Funktion an planaren und in porösen Hybridsystemen 
License: CC0 1.0 (Public Domain Dedication) CC0 1.0 (Public Domain Dedication)
Appears in Collections:Research Data TUHH

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