Please use this identifier to cite or link to this item: https://doi.org/10.15480/882.1458
This item is licensed with a CreativeCommons licence by-sa/4.0
Publisher URL: https://www.epubli.de/shop/buch/2000000069144
Title: Design of a cyber-physical production system for semiconductor manufacturing
Language: English
Authors: Keil, Sophia 
Editors: Kersten, Wolfgang 
Blecker, Thorsten 
Ringle, Christian M. 
Keywords: cyber-physical production system;multi-agent system;intelligent production lot;semiconductor manufacturing
Issue Date: Oct-2017
Publisher: epubli
Source: Digitalization in Supply Chain Management and Logistics
Volume number: 23
Journal or Series Name: Proceedings of the Hamburg International Conference of Logistics (HICL) 
Conference: Hamburg International Conference of Logistics (HICL) 2017 
Abstract (english): Due to the highly dynamic markets, an increasing complexity, and individualization of products, efficient and robust logistical processes are difficult to achieve through the use of central planning and control approaches. The aim of the contribution is the design of a decentralized, autonomous control system for high tech production systems. An interdisciplinary perspective was adopted as methods of artificial intelligence and mechanical as well as electrical engineering were used. The results are a hardware concept for an intelligent, cyber-physical production lot and a software concept based on a hierarchical multi-agent architecture. The basic idea of autonomy and self-control is not new. It can be traced back, for example, to the ideas of “Evolutionary Management”, or cybernetics. However, for the first time this contribution shows a practical application for a complex semiconductor manufacturing system. Until now, the hard and software concepts have been implemented prototypically. A long-term integration into the existing IT landscape of a semiconductor factory is planned. A well established and functioning centralized system should be supplemented by the new decentralized system, especially in areas in which there is not yet such a high level of automated processes, e. g. in wafer test facilities.
URI: http://tubdok.tub.tuhh.de/handle/11420/1461
DOI: 10.15480/882.1458
ISBN: 9783745043280
ISSN: 2365-5070
Type: InProceedings (Aufsatz / Paper einer Konferenz etc.)
Appears in Collections:Publications (tub.dok)

Files in This Item:
File Description SizeFormat
keil_cyber-physical_production_hicl_2017.pdfDesign of a Cyber-Physical Production System for Semiconductor Manufacturing22,05 MBAdobe PDFThumbnail
View/Open
Show full item record

Page view(s)

203
Last Week
0
Last month
10
checked on May 19, 2019

Download(s)

583
checked on May 19, 2019

Google ScholarTM

Check

Export

This item is licensed under a Creative Commons License Creative Commons