1D based sensores for gases and magnetic fileds - 1D-SENSE; Investigation of fabrication method for the realization of 1D nano structures on the basis of ALD

Akronym

1D-SENSE

Projekt Titel

Förderkennzeichen

16ESO291

Funding code

945.02-541

Startdatum

October 1, 2014

Enddatum

March 31, 2017

Funder

Bundesministerium für Bildung und Forschung (BMBF)

Projektträger

VDI/VDE Innovation + Technik GmbH

Institut

Mikrosystemtechnik E-7

Projektleitung

Trieu, Hoc Khiem

Mitarbeitende

Schulz, Norbert

1D nano structures are due to their high surface to volume ratio particularly sensitive sensor elements. ALD is known as a thin film deposition technique with high film quality and conformity. In this part of the project 1D-SENSE methods based on ALD for the generation of 1D nano structures on template materials as sensors for gases and magnetic fields are investigated.

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